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Effect of post nitride-passivation processing on the long-term stability of polysilicon IC resistors
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
2000 (English)In: J. Vac. Sci. Technol. B, Vol. 18, no 2, 690-694 p.Article in journal (Refereed) Published
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2000. Vol. 18, no 2, 690-694 p.
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URN: urn:nbn:se:uu:diva-39746OAI: oai:DiVA.org:uu-39746DiVA: diva2:67646
Available from: 2007-02-28 Created: 2007-02-28 Last updated: 2011-01-14

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