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Microfluidics integrable plasma source powered by a silicon through-substrate split-ring resonator
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)ORCID iD: 0000-0003-0832-1848
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
2013 (English)In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013, 2608-2611 p.Conference paper, Oral presentation only (Other academic)
Abstract [en]

A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured and evaluated. This device should offer straightforward integration with other MEMS components, and has a plasma discharge gap with a controlled volume and geometry, with potential for microfluidics. Two realized devices were resonant at around 2.9 GHz with quality factors of 26.6 and 18.7. Two different plasma ignition modes were observed, where the plasma at low pressures was not confined to the gap but rather appeared between the ends of the electrodes on the backside.

Place, publisher, year, edition, pages
2013. 2608-2611 p.
Keyword [en]
elemental semiconductors, ignition, microfluidics, micromechanical resonators, microstrip resonators, plasma instability, plasma pressure, plasma sources;silicon, MEMS, Si, microfluidics integrable plasma source, plasma discharge gap, plasma ignition modes, quality factors, silicon through-substrate split-ring resonator, Electrodes, Microstrip, Nickel, Optical resonators, Plasma sources, Substrates, Micro-fluidics, Microplasma source, Ni plating, RF, Split-ring resonator
National Category
Other Physics Topics Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology; Engineering Science with specialization in Microwave Technology
Identifiers
URN: urn:nbn:se:uu:diva-212362DOI: 10.1109/Transducers.2013.6627340OAI: oai:DiVA.org:uu-212362DiVA: diva2:677262
Conference
2013 Transducers Eurosensors XXVII: The 17th International Conference on
Available from: 2013-12-09 Created: 2013-12-09 Last updated: 2016-04-21

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Berglund, MartinPersson, AndersKratz, HenrikThornell, Greger

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