A design of high performance gas sensor array withdiscrete islands of Au catalyst for increasing of ZnO nanowire junctions
2013 (English)Conference proceedings (editor) (Refereed)
In this study, an effective design for growth of ZnO nanowires directly on gas sensor chips is introduced. The design utilizes the dendrite islands of Au catalyst deposited between and on the Pt electrodes for the nanowires to grow on instead of a continuous seed layer or Au film. This lead to an increase of the nanowirenanowire junctions in the devices, as well as a reduction of the leak current that would occur through the mentioned alternative seed layer; resulting in a higher sensitivity. The results showed that the developed gas sensors could be used for monitoring of NO2 at low concentration.
Place, publisher, year, edition, pages
IEEE conference proceedings, 2013. , 4 p.
Research subject Engineering Science with specialization in Microsystems Technology
IdentifiersURN: urn:nbn:se:uu:diva-212929DOI: W3P.043OAI: oai:DiVA.org:uu-212929DiVA: diva2:679706
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII