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Effects of Prior Carbon Ion Implant in Si substrate on Ni silicidation
Institute of Microelectronics of Chinese Academy of Sciences.
Fudan Univeristy.
Institute of Microelectronics of Chinese Academy of Sciences.
Institute of Microelectronics of Chinese Academy of Sciences.
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2013 (English)Conference paper, Poster (with or without abstract) (Other academic)
Place, publisher, year, edition, pages
2013.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-213581OAI: oai:DiVA.org:uu-213581DiVA: diva2:682659
Conference
17th European Workshop on Materials for Advanced Metallization 2013 (MAM’2013), Leuven, Belgium
Available from: 2013-12-29 Created: 2013-12-29 Last updated: 2014-02-03

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Zhang, Shi-Li

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Solid State Electronics
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