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Reactive diffusion in Ni/epi-SiGe layer stacks by microwave annealing
Fudan Univeristy.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Fudan Univeristy.
Fudan University.
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2013 (English)Conference paper, Poster (with or without abstract) (Other academic)
Place, publisher, year, edition, pages
2013.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-213586OAI: oai:DiVA.org:uu-213586DiVA: diva2:682661
Conference
17th European Workshop on Materials for Advanced Metallization 2013 (MAM’2013), Leuven, Belgium, March 11-13, 2013
Available from: 2013-12-29 Created: 2013-12-29 Last updated: 2014-02-03

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Gao, XindongZhang, Shi-Li

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