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PECVD by hollow cathodes
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1998 (English)In: Proceedings of the 41st Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Boston 1998, ISSN 0737-5921, Paper P-1, Proc., 1998, 315-320 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1998. 315-320 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40411OAI: oai:DiVA.org:uu-40411DiVA: diva2:68312
Available from: 2007-03-01 Created: 2007-03-01

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Bardos, LadislavBarankova, HanaBerg, Sören

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