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Bulk silicon holding structures for mounting of optical fibres in v-grooves
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1997 (English)In: J Microelectromech Syst, Vol. 6, no 1, 35-40 p.Article in journal (Refereed) Published
Abstract [en]

Silicon micromachining has been used for small-scale production of sensor elements for a fibre-optic pressure sensor. Each sensor is integrated with a guide wire for insertion of catheters during balloon dilatation of constricted arteries of the heart. Th

Place, publisher, year, edition, pages
1997. Vol. 6, no 1, 35-40 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-40433OAI: oai:DiVA.org:uu-40433DiVA: diva2:68334
Note
Addresses: Strandman C, UNIV UPPSALA, DEPT MAT SCI, BOX 534, S-75121 UPPSALA, SWEDEN. RADI MED SYST AB, UPPSALA, SWEDEN.Available from: 2007-03-05 Created: 2007-03-05 Last updated: 2012-06-20

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Bäcklund, Ylva

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