Bulk silicon holding structures for mounting of optical fibres in v-grooves
1997 (English)In: J Microelectromech Syst, Vol. 6, no 1, 35-40 p.Article in journal (Refereed) Published
Silicon micromachining has been used for small-scale production of sensor elements for a fibre-optic pressure sensor. Each sensor is integrated with a guide wire for insertion of catheters during balloon dilatation of constricted arteries of the heart. Th
Place, publisher, year, edition, pages
1997. Vol. 6, no 1, 35-40 p.
Other Electrical Engineering, Electronic Engineering, Information Engineering
IdentifiersURN: urn:nbn:se:uu:diva-40433OAI: oai:DiVA.org:uu-40433DiVA: diva2:68334
Addresses: Strandman C, UNIV UPPSALA, DEPT MAT SCI, BOX 534, S-75121 UPPSALA, SWEDEN. RADI MED SYST AB, UPPSALA, SWEDEN.2007-03-052007-03-052012-06-20