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Linear arc discharge source for large area plasma processing
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1997 (English)In: Appl Phys Lett, Vol. 70, 577-579 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1997. Vol. 70, 577-579 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40434OAI: oai:DiVA.org:uu-40434DiVA: diva2:68335
Available from: 2007-03-02 Created: 2007-03-02 Last updated: 2011-01-15

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Bardos, LadislavBarankova, HanaBerg, Sören

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