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Colloidal Silica as a Final Polishing Slurry
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1997 (English)In: CMP´97. 4-5, 1997, 244-245 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1997. 244-245 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40439OAI: oai:DiVA.org:uu-40439DiVA: diva2:68340
Available from: 2007-03-05 Created: 2007-03-05

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Olsson, Jörgen

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