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Improvement of the Long-Term Stability of Polysilicon IC-Resistors by Fluorine Doping
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
1997 (English)In: Materials Research Symposium. 472, 1997, 457-462 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1997. 457-462 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40448OAI: oai:DiVA.org:uu-40448DiVA: diva2:68349
Available from: 2007-03-05 Created: 2007-03-05

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Smith, Ulf

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