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Resputtering effects during ion beam assisted deposition and the sputter yield amplification effect
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1996 (English)In: Surface & Coatings Technology, Vol. 84, 353-362 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 84, 353-362 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40454OAI: oai:DiVA.org:uu-40454DiVA: diva2:68355
Available from: 2007-03-05 Created: 2007-03-05 Last updated: 2011-01-15

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Berg, SörenKatardjiev, Ilia

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