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Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1996 (English)In: Solid State Phenomena, Vol. 51-52, 561-566 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 51-52, 561-566 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40469OAI: oai:DiVA.org:uu-40469DiVA: diva2:68370
Available from: 2007-03-06 Created: 2007-03-06 Last updated: 2011-01-15

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