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Terracing of (100) Si with one mask and one etching step using misaligned V-grooves
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1996 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 6, no 1, 39-42 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1996. Vol. 6, no 1, 39-42 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40471DOI: 10.1088/0960-1317/6/1/006OAI: oai:DiVA.org:uu-40471DiVA: diva2:68372
Available from: 2007-03-06 Created: 2007-03-06 Last updated: 2017-12-06Bibliographically approved

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Bäcklund, Ylva

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