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A method for the determination of the angular dependence during dry etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
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1995 (English)In: The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995Conference paper, Published paper (Refereed)
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1995.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40521OAI: oai:DiVA.org:uu-40521DiVA: diva2:68422
Available from: 2007-03-07 Created: 2007-03-07 Last updated: 2012-06-20

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Katardjiev, IliaBäcklund, YlvaBerg, SörenBlom, Hans-Olof

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