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Fabrication of bulk silicon holding structures for mounting of optical fibres in V-grooves
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
1995 (English)In: The SPIE conf on Micromachining and Microfabrication ´95, Oct 23-24, Austin, USA, 1995Conference paper, Published paper (Refereed)
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1995.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-40522OAI: oai:DiVA.org:uu-40522DiVA: diva2:68423
Available from: 2007-03-07 Created: 2007-03-07 Last updated: 2012-06-20

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Bäcklund, Ylva

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