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Crystalline defects in InP-to-silicon direct wafer bonding
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2001 (English)In: Jap. J. Appl. Phys., Vol. 40, 4837-4844 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2001. Vol. 40, 4837-4844 p.
URN: urn:nbn:se:uu:diva-41057OAI: oai:DiVA.org:uu-41057DiVA: diva2:68958
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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