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Effect of Dopants on Mechanical Polishing of Silicon
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2001 (English)In: Proceedings of MAM2001, p. O4.4, March 5-7, Sigtuna Sweden, 2001Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2001.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-41063OAI: oai:DiVA.org:uu-41063DiVA: diva2:68964
Available from: 2007-02-27 Created: 2007-02-27

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Olsson, Jörgen

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