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Integration of a thin InP Schottky diode to silicon for coplanar micromachined membrane waveguide technology
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2001 (English)In: Proc. MME 2001, Cork, Ireland, Sept. 16-18, 2001Conference paper (Refereed)
Place, publisher, year, edition, pages
URN: urn:nbn:se:uu:diva-41105OAI: oai:DiVA.org:uu-41105DiVA: diva2:69006
Available from: 2008-10-17 Created: 2008-10-17

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