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InP-to-Si wafer heterobonding
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2001 (English)In: Workshop on wafer bonding, Göteborg, Sweden, April 25, 2001, 3- p.Conference paper (Refereed)
Place, publisher, year, edition, pages
2001. 3- p.
URN: urn:nbn:se:uu:diva-41107OAI: oai:DiVA.org:uu-41107DiVA: diva2:69008
Available from: 2008-10-17 Created: 2008-10-17

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