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Thermal Stability of Nanocrystalline Sn-doped In Oxide Films. MICRO-MEMS 2001.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. SOLID STATE PHYSICS.
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2001 (English)In: SPIE Int. Symp. Microelectronics and Micro-Electro-Mechanical Systems, Adelaide, Australia, Dec 17-19, paper 4590-49, (2001)., 2001Conference paper (Other scientific)
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URN: urn:nbn:se:uu:diva-41118OAI: oai:DiVA.org:uu-41118DiVA: diva2:69019
Available from: 2008-06-08 Created: 2008-06-08

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