uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Transfer of micro-optical structures into gallium arsenide and diamond
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE/MST.
2001 (English)In: Proc. SPIE 4561, MOEMS and Miniaturized Systems II, San Francisco, USA, 2001, 114-122 p.Conference paper (Refereed)
Place, publisher, year, edition, pages
2001. 114-122 p.
URN: urn:nbn:se:uu:diva-41164OAI: oai:DiVA.org:uu-41164DiVA: diva2:69065
Available from: 2008-10-17 Created: 2008-10-17

Open Access in DiVA

No full text

By organisation
Department of Materials Science

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Total: 98 hits
ReferencesLink to record
Permanent link

Direct link