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Compositional changes during ion-assisted deposition of TixW1-x barrier layers on structured surfaces
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
1995 (English)In: The 42nd international symposium of the American Vacuum Society, San José, USA, 1995Conference paper, Published paper (Refereed)
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1995.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-42033OAI: oai:DiVA.org:uu-42033DiVA: diva2:69934
Available from: 2007-03-07 Created: 2007-03-07

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Berg, SörenKatardjiev, Ilia

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