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Atomic layer growth of epitaxial TiO2 thin films from TiCl4 and H2O on a-Al2O3 substrates
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. oorganisk kemi.
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2002 (English)In: J. Cryst. Growth, no 242, 189-198 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. no 242, 189-198 p.
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Inorganic Chemistry
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URN: urn:nbn:se:uu:diva-42150OAI: oai:DiVA.org:uu-42150DiVA: diva2:70051
Available from: 2008-09-22 Created: 2008-09-22 Last updated: 2011-01-13

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