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Atomic layer deposition of BN thin films
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
Technology, Department of Materials Science. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
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2002 (English)In: Thin Solid Films, no 402, p. 167-171Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. no 402, p. 167-171
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Inorganic Chemistry
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URN: urn:nbn:se:uu:diva-42173OAI: oai:DiVA.org:uu-42173DiVA, id: diva2:70074
Available from: 2006-11-28 Created: 2006-11-28 Last updated: 2011-01-13

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Ottosson, MikaelLarsson, KarinCarlsson, Jan-Otto

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