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Transfer of continuous-relief diffractive structures into diamond by use of inductively coupled plasma dry etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
2001 (English)In: Optics Letters, ISSN 0146-9592, E-ISSN 1539-4794, Vol. 26, 1752-1754 p.Article in journal (Refereed) Published
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2001. Vol. 26, 1752-1754 p.
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Atom and Molecular Physics and Optics
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URN: urn:nbn:se:uu:diva-42348DOI: 10.1364/OL.26.001752OAI: oai:DiVA.org:uu-42348DiVA: diva2:70249
Available from: 2007-02-15 Created: 2007-02-15 Last updated: 2017-12-05

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Publisher's full texthttp://www.opticsinfobase.org/ol/abstract.cfm?uri=ol-26-22-1752

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Karlsson, MikaelHjort, KlasNikolajeff, Fredrik

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