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Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Chalmers University of Technology, Sweden.
Chalmers University of Technology, Sweden.
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2003 (English)In: IEEE Photonics Technology Letters, ISSN 1041-1135, E-ISSN 1941-0174, Vol. 15, no 3, 359-361 p.Article in journal (Refereed) Published
Abstract [en]

In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.

Place, publisher, year, edition, pages
2003. Vol. 15, no 3, 359-361 p.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:uu:diva-220858DOI: 10.1109/LPT.2003.807906OAI: oai:DiVA.org:uu-220858DiVA: diva2:706782
Available from: 2014-03-21 Created: 2014-03-21 Last updated: 2017-12-05

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Karlsson, MikaelNikolajeff, Fredrik

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