Monolithic integration of continuous-relief diffractive structures with vertical-cavity surface-emitting lasers
2003 (English)In: IEEE Photonics Technology Letters, ISSN 1041-1135, E-ISSN 1941-0174, Vol. 15, no 3, 359-361 p.Article in journal (Refereed) Published
In this work, we have studied the transfer of diffractive optical elements (DOEs), originally made in resist, into GaAs for monolithic integration with vertical-cavity surface-emitting lasers (VCSELs). The DOEs are blazed gratings and Fresnel lenses, and have been fabricated on the back surface of bottom emitting VCSELs using electron-beam lithography or replication by hot embossing in resist followed by a quick-dry etch step. Diffraction efficiency was measured to be 81% in the first order of diffraction for the blazed grating.
Place, publisher, year, edition, pages
2003. Vol. 15, no 3, 359-361 p.
Atom and Molecular Physics and Optics
IdentifiersURN: urn:nbn:se:uu:diva-220858DOI: 10.1109/LPT.2003.807906OAI: oai:DiVA.org:uu-220858DiVA: diva2:706782