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Material- and fabrication-governedperformance of a tunnellingmagnetometer
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (The Ångström Space Technology Centre (ÅSTC))
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (Ångström Space Technology Centre (ÅSTC), Ångström Space Technology Centre (ÅSTC))
2010 (English)In: Material- and fabrication-governedperformance of a tunnellingmagnetometer, 2010Conference paper, Published paper (Refereed)
Abstract [en]

Miniaturization of sensitive magnetic sensors for nano- and picosatellites has come to the point where the traditional sensors with magnetic coils soon can be replaced. Thin film technology offers the possibility of making extremely small magnetic field sensors that employ the effect of anisotropic, giant and tunneling magnetoresistance (AMR, GMR and TMR). In this paper, the development status of sensors based on microelectromechanical systems technology (MEMS), starting from a TMR layer structure is presented. The sensors have been successfully fabricated and integrated onto an electronic circuit designed for space application. The system as a whole, and the sensors in particular, have not only been haracterized with respect to sensitivity, resolution, and noise level, but also to launch vibration and space radiation. The sensor performance and limitations are strongly dependent on the deposited materials, sensor design, and fabrication process. Since the sensor elements are small and sensitive (with lateral dimensions of some tens of micrometres, and resolution of 100 pT at frequencies of MHz), they are also promising for other MEMS applications

Place, publisher, year, edition, pages
2010.
Keyword [en]
MTJ, rapid prototyping, magnetic sensor, magnetometer, micro, MEMS
National Category
Natural Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Materials Science
Identifiers
URN: urn:nbn:se:uu:diva-221217OAI: oai:DiVA.org:uu-221217DiVA: diva2:707951
Conference
IWAMSN 2010, The 5th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY
Available from: 2014-03-26 Created: 2014-03-26 Last updated: 2016-04-19

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Nguyen, HugoPersson, AndersThornell, Greger

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CiteExportLink to record
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