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High-temperature behaviour of capped Ag/Ta and Ag/TaN metal stacks
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2014 (English)Conference paper, Poster (with or without abstract) (Refereed)
Place, publisher, year, edition, pages
2014. 137-138 p.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-197278OAI: oai:DiVA.org:uu-197278DiVA: diva2:709075
Conference
MAM 2014 - Materials for Advanced Metallization, 2-5 March 2014, Chemnitz, Germany
Funder
Swedish Foundation for Strategic Research Swedish Research Council
Available from: 2014-03-31 Created: 2013-03-21 Last updated: 2014-07-18Bibliographically approved

Open Access in DiVA

MAM2014_capped Ag/Ta and Ag/TaN(219 kB)275 downloads
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File name FULLTEXT01.pdfFile size 219 kBChecksum SHA-512
6f2fc3acf6ba8bb7a4d686d4e2e80667eddd3c572fff4ac89e2ec95a7af2ab6ba0998ab322372028b09c081bdcdbcf59c0b523c00d0b1e41ff466e52efa994de
Type fulltextMimetype application/pdf

Other links

http://www.mam-conference.org/MAM2014/index.php?activ=home&content=mam2008.php

Authority records BETA

Mardani, ShabnamNorström, HansOlsson, JörgenVallin, ÖrjanZhang, Shili

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Mardani, ShabnamNorström, HansOlsson, JörgenVallin, ÖrjanZhang, Shili
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CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf