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A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
IMEC/SSET, Leuven, Belgien.
IMEC/SSET, Leuven, Belgien.
UCL, Louvain-la-Neuve, Belgien.
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2010 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2010. -726 p.
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-221669OAI: oai:DiVA.org:uu-221669DiVA: diva2:709745
Conference
IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010
Available from: 2014-04-03 Created: 2014-04-03 Last updated: 2017-01-25

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Dancila, Dragos

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