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Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2014 (English)In: Surface & Coatings Technology, ISSN 0257-8972, E-ISSN 1879-3347, Vol. 240, 281-285 p.Article in journal (Refereed) Published
Abstract [en]

Cu2ZnSnS4 (TS) is a promising material for thin film solar cells which contains only abundant elements. This work focuses on the stability of elemental composition of films deposited by reactive sputtering of CuSn alloy targets in H2S. Long equilibration times of several hours were observed. The main reason is the formation of a thick Cu2S layer on the target surface. Especially in areas with low erosion rate, the Cu2S thickness reaches up to 700 pm and is accompanied by a preferential loss of Sn from the target. Based on the results, it is suggested that the formation of Cu2S may be limited either by more uniform erosion of the target surface or by reduction of the H2S partial pressure.

Place, publisher, year, edition, pages
2014. Vol. 240, 281-285 p.
Keyword [en]
Reactive sputtering, H2S, Sulfides, CZTS, Cu2ZnSnS4, CuSn sputtering
National Category
Natural Sciences Engineering and Technology
Research subject
Engineering Science with specialization in Electronics
Identifiers
URN: urn:nbn:se:uu:diva-222175DOI: 10.1016/j.surfcoat.2013.12.042ISI: 000331989900038OAI: oai:DiVA.org:uu-222175DiVA: diva2:711500
Available from: 2014-04-10 Created: 2014-04-08 Last updated: 2017-12-05Bibliographically approved

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Kubart, TomasEricson, ToveScragg, Jonathan J.Edoff, MarikaPlatzer-Bjorkman, Charlotte

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