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Ultra low contact resistivities for CMOS beyond 10nm node
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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2013 (English)In: IEEE Electron Device Letters, ISSN 0741-3106, E-ISSN 1558-0563, Vol. 34, 723-725 p.Article in journal, Letter (Refereed) Published
Place, publisher, year, edition, pages
2013. Vol. 34, 723-725 p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-222345OAI: oai:DiVA.org:uu-222345DiVA: diva2:711530
Available from: 2014-04-10 Created: 2014-04-10 Last updated: 2014-04-10

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