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Subtractive W Contact and Local Interconnect Co-integration (CLIC)
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2013 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-222466OAI: oai:DiVA.org:uu-222466DiVA: diva2:711668
IEEE International interconnect technology conference
Available from: 2014-04-10 Created: 2014-04-10 Last updated: 2014-04-10

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Zhen, Zhang
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Solid State Electronics
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