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Subtractive W Contact and Local Interconnect Co-integration (CLIC)
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2013 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2013.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-222466OAI: oai:DiVA.org:uu-222466DiVA: diva2:711668
Conference
IEEE International interconnect technology conference
Available from: 2014-04-10 Created: 2014-04-10 Last updated: 2014-04-10

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Zhen, Zhang

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CiteExportLink to record
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  • apa
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