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Influence of varying porogen loads and different UV cures on low-kappa film characteristics
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2011 (English)In: Journal of Nanoscience and Nanotechnology, ISSN 1533-4880, E-ISSN 1533-4899, Vol. 11, no 9, 8363-8367 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2011. Vol. 11, no 9, 8363-8367 p.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
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Engineering Science with specialization in Microsystems Technology
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URN: urn:nbn:se:uu:diva-222488OAI: oai:DiVA.org:uu-222488DiVA: diva2:711762
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2017-12-05

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Mardani, Shabnam

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