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Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water
Department of Chemical Engineering, Stanford University, Stanford, California. (Thin film solar cells)ORCID iD: 0000-0001-6589-3514
2013 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 31Article in journal (Refereed) Published
Place, publisher, year, edition, pages
American Vacuum Society (AVS) , 2013. Vol. 31
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Materials Engineering
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URN: urn:nbn:se:uu:diva-222491DOI: 10.1116/1.4812717ISI: 000327253900028OAI: oai:DiVA.org:uu-222491DiVA, id: diva2:711767
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2017-12-05Bibliographically approved

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Publisher's full texthttp://dx.doi.org/10.1116/1.4812717

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Hägglund, Carl

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