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Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
IMEC.
IMEC.
IMEC.
Imec, Kapeldreef, Leuven, Belgium.
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2013 (English)In: Microelectronic Engineering, ISSN 0167-9317, E-ISSN 1873-5568, Vol. 107, 134-137 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
Elsevier, 2013. Vol. 107, 134-137 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-222490DOI: 10.1016/j.mee.2012.09.012ISI: 000319855800025OAI: oai:DiVA.org:uu-222490DiVA: diva2:711773
Conference
21st International Workshop on Materials for Advanced Metallization (MAM, Grenoble, France, Mars 11-14, 2012
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2017-12-05Bibliographically approved

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Mardani, Shabnam

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