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Growth characteristics, material properties, and optical properties of zinc oxysulfide films deposited by atomic layer deposition
Stanford University, Stanford, California, USA. (Thin film solar cells)ORCID iD: 0000-0001-6589-3514
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2012 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 30, 01A135- p.Article in journal (Refereed) Published
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American Vacuum Society (AVS) , 2012. Vol. 30, 01A135- p.
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Chemical Engineering Materials Engineering
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URN: urn:nbn:se:uu:diva-222500DOI: 10.1116/1.3664758OAI: oai:DiVA.org:uu-222500DiVA: diva2:711786
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2017-12-05Bibliographically approved

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Publisher's full texthttp://dx.doi.org/10.1116/1.3664758

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Hägglund, Carl

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