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DUAL SILICIDE PROCESS COMPATIBLE WITH A REPLACEMENT-METAL-GATE
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2012 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2012.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-222574OAI: oai:DiVA.org:uu-222574DiVA: diva2:711867
Patent
US
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2014-04-11

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Zhen, Zhang

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CiteExportLink to record
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