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IR-reflectance assessment of the tilt angle of AlN-wurtzite films for shear mode resonators
2013 (English)Conference paper (Refereed)
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Composite Science and Engineering
URN: urn:nbn:se:uu:diva-222614DOI: 10.1109/EFTF-IFC.2013.6702081OAI: oai:DiVA.org:uu-222614DiVA: diva2:711946
European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC), 2013 Joint
Available from: 2014-04-11 Created: 2014-04-11 Last updated: 2014-08-11

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Moreira, Milena
Composite Science and Engineering

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