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Hollow Cathode Plasma Cleaning and Surface Activation
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2002 (English)In: Proceedings of the 45th Annual Tech.Conf. of the Society of Vacuum Coaters (SVC), Orlando, April 2002, www.svc.org., Proc, 2002, 109-112 p.Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2002. 109-112 p.
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Other Electrical Engineering, Electronic Engineering, Information Engineering
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URN: urn:nbn:se:uu:diva-44580OAI: oai:DiVA.org:uu-44580DiVA: diva2:72485
Available from: 2007-02-23 Created: 2007-02-23

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Barankova, HanaBardos, Ladislav

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