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Point defects generated by direct-wafer bonding of silicon
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE /MICROSYSTEMS TECHNOLOGY.
2002 (English)In: J. of Electronic Materials, Vol. 31, no 2, 113-118 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. Vol. 31, no 2, 113-118 p.
National Category
Materials Engineering
URN: urn:nbn:se:uu:diva-44899OAI: oai:DiVA.org:uu-44899DiVA: diva2:72805
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-13

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