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Transfer of micro-optical structures into GaAs by use of inductively coupled plasma dry etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
2002 (English)In: Applied Optics, ISSN 0003-6935, E-ISSN 1539-4522, Vol. 41, 902-908 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. Vol. 41, 902-908 p.
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Atom and Molecular Physics and Optics
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URN: urn:nbn:se:uu:diva-44906DOI: 10.1364/AO.41.000902OAI: oai:DiVA.org:uu-44906DiVA: diva2:72812
Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2017-12-05

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Publisher's full texthttp://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-41-5-902

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Karlsson, MikaelNikolajeff, Fredrik

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