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Ion track lithography at The Ångström Laboratory
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. MATERIALS SCIENCE / MICROSYSTEMS TECHNOLOGY.
2002 (English)In: Granzer Workshop 2002, Darmstadt, 2002Conference paper (Refereed)
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Materials Engineering
URN: urn:nbn:se:uu:diva-44937OAI: oai:DiVA.org:uu-44937DiVA: diva2:72844
Available from: 2008-10-17 Created: 2008-10-17

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