uu.seUppsala University Publications
Change search
ReferencesLink to record
Permanent link

Direct link
Structure and electrical properties of Nb-Ge-C nanocomposite coatings
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Show others and affiliations
2014 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 32, no 4, 041509- p.Article in journal (Refereed) Published
Abstract [en]

Nb-Ge-C nanocomposite thin films were deposited by dc magnetron sputtering using three elemental targets. The films consist of substoichiometric NbCx in a nanometer-thick matrix of amorphous C and Ge. Films with no Ge contain grains that are elongated in the growth direction with a (111) preferred crystallographic orientation. With the addition of similar to 12 at. % Ge, the grains are more equiaxed and exhibit a more random orientation. At even higher Ge contents, the structure also becomes denser. The porous structure of the low Ge content films result in O uptake from the ambient. With higher C content in the films both the amount of amorphous C and C/Nb-ratio increases. The contact resistance was measured by four-point technique as a function of contact force between 0 and 10 N. The lowest contact resistance (1.7 m Omega) is obtained at 10 N. The resistivity varies between 470 and 1700 mu Omega center dot cm depending on porosity and O content.  

Place, publisher, year, edition, pages
2014. Vol. 32, no 4, 041509- p.
National Category
Chemical Sciences Physical Sciences
URN: urn:nbn:se:uu:diva-229734DOI: 10.1116/1.4882856ISI: 000338718400021OAI: oai:DiVA.org:uu-229734DiVA: diva2:738253
Available from: 2014-08-16 Created: 2014-08-12 Last updated: 2014-08-16Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Search in DiVA

By author/editor
Nedfors, NilsJansson, Ulf
By organisation
Inorganic Chemistry
In the same journal
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Chemical SciencesPhysical Sciences

Search outside of DiVA

GoogleGoogle Scholar
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

Altmetric score

Total: 386 hits
ReferencesLink to record
Permanent link

Direct link