uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
ToF-MEIS stopping measurements in thin SiC films
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy.
Show others and affiliations
2014 (English)In: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, E-ISSN 1872-9584, Vol. 332, 130-133 p.Article in journal (Refereed) Published
Abstract [en]

Electronic stopping in thin, amorphous, SiC films has been studied by time-of-flight medium energy ion scattering and conventional Rutherford backscattering spectrometry. Amorphous SiC films (8, 21 and 36 nm) were prepared by laser ablation using a single crystalline silicon carbide target. Two kinds of substrate films, one with a lower atomic mass (carbon) and one with higher atomic mass (iridium) compared to silicon has been used. Monte Carlo simulations have been used to evaluate electronic stopping from the shift in energy for the signal scattered from Ir with and without SiC. The two kinds of samples are used to illustrate the strength and challenges for ToF-MEIS compared to conventional RBS.  

Place, publisher, year, edition, pages
2014. Vol. 332, 130-133 p.
Keyword [en]
SiC, MEIS, RBS, Electronic stopping cross section
National Category
Physical Sciences
Identifiers
URN: urn:nbn:se:uu:diva-230240DOI: 10.1016/j.nimb.2014.02.045ISI: 000339131200029OAI: oai:DiVA.org:uu-230240DiVA: diva2:739805
Conference
21st International Conference on Ion Beam Analysis (IBA), JUN 23-28, 2013, Seattle, USA
Available from: 2014-08-21 Created: 2014-08-21 Last updated: 2017-12-05Bibliographically approved

Open Access in DiVA

No full text

Other links

Publisher's full text

Authority records BETA

Primetzhofer, DanielPossnert, Göran

Search in DiVA

By author/editor
Primetzhofer, DanielPossnert, Göran
By organisation
Department of Physics and Astronomy
In the same journal
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Physical Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 227 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf