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New materials and new processes for MEMS applications
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science.
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2000 (English)In: Proc. Mat. Res. Soc. Symp., , 57-72 p.Conference proceedings (editor) (Other scientific)
Place, publisher, year, edition, pages
2000. , 57-72 p.
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Materials Engineering
URN: urn:nbn:se:uu:diva-46507OAI: oai:DiVA.org:uu-46507DiVA: diva2:74414
Available from: 2008-10-17 Created: 2008-10-17

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