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Cross-sectional transmission electron microscopy study of the influence of niobium on the formation of titanium silicide in small-feature contacts
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
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2003 (English)In: Journal of Applied Physics, Vol. 93, no 8, 4480-4484 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2003. Vol. 93, no 8, 4480-4484 p.
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Materials Engineering
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URN: urn:nbn:se:uu:diva-47019OAI: oai:DiVA.org:uu-47019DiVA: diva2:74926
Available from: 2007-01-25 Created: 2007-01-25 Last updated: 2011-01-13

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