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Ni silicide formation on polycrystalline SiGe and SiGeC layers
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Materials Science. Physics, Department of Physics and Materials Science, Materials Science. Materialvetenskap.
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2003 (English)Conference paper (Refereed)
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Materials Engineering
URN: urn:nbn:se:uu:diva-47022OAI: oai:DiVA.org:uu-47022DiVA: diva2:74929
Available from: 2007-01-25 Created: 2007-01-25

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