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Ion track enhanced chemical etching of flexible laminates for low-cost MEMS
Lindeberg, M
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. MATERIALS SCIENCE / MST.
Skupinski, M
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
Majjad, H
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
Hjort, K
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
2003 (English)
Conference proceedings (editor) (Refereed)
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2003.
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urn:nbn:se:uu:diva-47216
OAI: oai:DiVA.org:uu-47216
DiVA, id:
diva2:75123
Available from:
2007-01-16
Created:
2007-01-16
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