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Ion track lithography: novel low-cost process to form deep vertical and high aspect ratio MEMS in flexible laminates
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. MATERIALS SCIENCE / MST.
2003 (English)In: DTIP 2003, The Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, , 314-320 p.Conference proceedings (editor) (Other scientific)
Place, publisher, year, edition, pages
2003. , 314-320 p.
National Category
Materials Engineering
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URN: urn:nbn:se:uu:diva-47218OAI: oai:DiVA.org:uu-47218DiVA: diva2:75125
Available from: 2008-10-17 Created: 2008-10-17

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CiteExportLink to record
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  • apa
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