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Micromachining by ion track etching and projection lithography: a low-cost process to form microstructures with small laterial dimensions and high aspect ratios in commercial foils
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. MATERIALS SCIENCE / MST.
2003 (English)In: HARMST '03, , 53-54 p.Conference proceedings (editor) (Other scientific)
Place, publisher, year, edition, pages
2003. , 53-54 p.
National Category
Materials Engineering
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URN: urn:nbn:se:uu:diva-47222OAI: oai:DiVA.org:uu-47222DiVA: diva2:75129
Available from: 2008-10-17 Created: 2008-10-17

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CiteExportLink to record
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